Precursor

TMA

Structure Name Bis(diethylamino)silance
Formula C3H9Al
Molecular Weight 72.09g/mol
Vapor Pressure 11 torr at 20℃
Density (at 25 ℃) 0.75g/ml
State Colorless liquid
CAS NO. 75-24-1

TMG

Structure Name Bis(diethylamino)silance
Formula C3H9Al
Molecular Weight 72.09g/mol
Vapor Pressure 11 torr at 20℃
Density (at 25 ℃) 0.75g/ml
State Colorless liquid
CAS NO. 75-24-1

TDMAHf

Structure Name Tetrakis(dimethylamino) hafnium
Formula C8H24N4Hf
Molecular Weight 354.8g/mol
Vapor Pressure 1.0 torr at 65℃
Density (at 25 ℃) 1.39g/ml
State Pale Yellow liquid
CAS NO. 19782-68-4

CpTDMAHf

Structure Name Cyclopentadienyl tris(dimethylamino) hafnium
Formula C11H23N3Hf
Molecular Weight 375.82g/mol
Vapor Pressure 0.2 torr/70℃
Density (at 25 ℃) 1.56g/ml
State (at 25 ℃) Pale Yellow liquid
CAS NO. 941596-80-1

TMI

Structure Name Trimethylindium
Formula C3H9In
Molecular Weight 159.92g/mol
Vapor Pressure 7.8 torr at 40℃
Density (at 25 ℃) 1.568g/ml
State White Solid
CAS NO. 3385-78-2

BDEASi

Structure Name Bis(diethylamino)silance
Formula C8H22N2Si
Molecular Weight 174.36g/mol
Vapor Pressure 20 torr at 60 ℃
Density (at 25 ℃) 0.75g/ml
State Colorless liquid
CAS NO. 27804-64-4

TDMASi

Structure Name Bis(diethylamino)silance
Formula C6H19N3Si
Molecular Weight 161.32g/mol
Vapor Pressure 7 torr at 25℃
Density (at 25 ℃) 0.838g/ml
State Colorless liquid
CAS NO. 15112-89-7

BTBASi

Structure Name Bis(diethylamino)silance
Formula C8H22N2Si
Molecular Weight 174.36g/mol
Vapor Pressure 6.5 torr at 45℃
Density (at 25 ℃) 0.816g/ml
State Colorless liquid
CAS NO. 186598-40-3

TDMATi

Structure Name Tetrakis(dimethylamino)titanium
Formula C8H24N4Hf
Molecular Weight 224.18g/mol
Vapor Pressure 0.1 torr at 25℃
Density (at 25 ℃) 0.947g/ml
State Yellow liquid
CAS NO. 3275-24-9

DEZ

Structure Name Diethylzinc
Formula C4H10Zn
Molecular Weight 123.49g/mol
Vapor Pressure 12 torr at 20℃
Density (at 25 ℃) 1.2g/ml
State Colorless liquid
CAS NO. 557-20-0

TTIP

Structure Name Tetrakis-isopropoxidetitanium
Formula C12H28O4Ti
Molecular Weight 284.22g/mol
Vapor Pressure 0.9 torr at 50℃
Density (at 25 ℃) 0.96g/ml
State Colorless liquid
CAS NO. 546-68-9

TiCl4

Structure Name Tetrachlorotitanium
Formula Cl4Ti
Molecular Weight 189.67g/mol
Vapor Pressure 9.7 torr at 20℃
Density (at 25 ℃) 1.72g/ml
State Colorless liquid
CAS NO. 7550-45-0

TDMAZr

Structure Name Tetrakis(dimethylamino)zirconium
Formula C8H22N2Si
Molecular Weight 267.53g/mol
Vapor Pressure 0.1 torr at 80℃
Density (at 25 ℃) N/A
State (at 25 ℃) Pale Yellow liquid
CAS NO. 19756-04-8

CpTDMAZr

Structure Name Cyclopentadienyl tris(dimethylamino)zirconium
Formula C11H23N3Zr
Molecular Weight 288.55g/mol
Vapor Pressure 0.1 torr at 95℃
Density (at 25 ℃) 1.17g/ml
State (at 25 ℃) Pale Yellow liquid
CAS NO. 33271-88-4

CpNZr

Structure Name Cyclopentadienylethylmethylamino-bis(dimethylamino)zirconium
Formula C11H23N3Zr
Molecular Weight 288.55g/mol
Vapor Pressure 0.1 torr at 95℃
Density (at 25 ℃) 1.17g/ml
State Pale Yellow liquid
CAS NO. 33271-88-4

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